MEMS-based piezoelectric array microjet
Article in Microelectronic Engineering (April 2003)
The most recent citing publications are shown below. View all 9 publications that cite this research output on Dimensions.
Article in Microelectronic Engineering (April 2003)
Article in IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control (January 2003)
Article in IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control (May 2002)