Manufacturing of 3D submicronic structures at wafer scale
Conference proceeding in Proceedings of SPIE--the International Society for Optical Engineering (April 2024)
The most recent citing publications are shown below. View all 54 publications that cite this research output on Dimensions.
Conference proceeding in Proceedings of SPIE--the International Society for Optical Engineering (April 2024)
Article in Scientific Reports (April 2024)
Preprint in Research Square (December 2023)