| Title |
Nanoimprint lithography for nanodevice fabrication
|
|---|---|
| Published in |
Nano Convergence, September 2016
|
| DOI | 10.1186/s40580-016-0081-y |
| Pubmed ID | |
| Authors |
Steven Barcelo, Zhiyong Li |
| Abstract |
Nanoimprint lithography (NIL) is a compelling technique for low cost nanoscale device fabrication. The precise and repeatable replication of nanoscale patterns from a single high resolution patterning step makes the NIL technique much more versatile than other expensive techniques such as e-beam or even helium ion beam lithography. Furthermore, the use of mechanical deformation during the NIL process enables grayscale lithography with only a single patterning step, not achievable with any other conventional lithography techniques. These strengths enable the fabrication of unique nanoscale devices by NIL for a variety of applications including optics, plasmonics and even biotechnology. Recent advances in throughput and yield in NIL processes demonstrate the potential of being adopted for mainstream semiconductor device fabrication as well. |
Mendeley readers
The data shown below were compiled from readership statistics for 141 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| United Kingdom | 1 | <1% |
| Unknown | 140 | 99% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 20 | 14% |
| Researcher | 18 | 13% |
| Student > Master | 17 | 12% |
| Student > Bachelor | 16 | 11% |
| Other | 6 | 4% |
| Other | 17 | 12% |
| Unknown | 47 | 33% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 42 | 30% |
| Chemistry | 12 | 9% |
| Materials Science | 9 | 6% |
| Biochemistry, Genetics and Molecular Biology | 7 | 5% |
| Physics and Astronomy | 7 | 5% |
| Other | 15 | 11% |
| Unknown | 49 | 35% |
Attention Score in Context
This research output has an Altmetric Attention Score of 4. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 01 October 2018.
All research outputs
#6,442,806
of 22,886,568 outputs
Outputs from Nano Convergence
#28
of 105 outputs
Outputs of similar age
#101,407
of 337,400 outputs
Outputs of similar age from Nano Convergence
#1
of 3 outputs
Altmetric has tracked 22,886,568 research outputs across all sources so far. This one has received more attention than most of these and is in the 70th percentile.
So far Altmetric has tracked 105 research outputs from this source. They receive a mean Attention Score of 4.9. This one has gotten more attention than average, scoring higher than 70% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 337,400 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 68% of its contemporaries.
We're also able to compare this research output to 3 others from the same source and published within six weeks on either side of this one. This one has scored higher than all of them