| Title |
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
|
|---|---|
| Published in |
Micro and Nano Systems Letters, February 2021
|
| DOI | 10.1186/s40486-021-00129-0 |
| Authors |
Prem Pal, Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Ashok Kumar Pandey, Hiroshi Tanaka, Kazuo Sato |
Mendeley readers
The data shown below were compiled from readership statistics for 118 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 118 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 25 | 21% |
| Researcher | 10 | 8% |
| Student > Master | 9 | 8% |
| Student > Bachelor | 6 | 5% |
| Unspecified | 6 | 5% |
| Other | 12 | 10% |
| Unknown | 50 | 42% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 19 | 16% |
| Materials Science | 13 | 11% |
| Physics and Astronomy | 11 | 9% |
| Unspecified | 7 | 6% |
| Chemistry | 6 | 5% |
| Other | 8 | 7% |
| Unknown | 54 | 46% |
Attention Score in Context
This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 22 June 2021.
All research outputs
#13,226,909
of 23,310,485 outputs
Outputs from Micro and Nano Systems Letters
#12
of 38 outputs
Outputs of similar age
#191,407
of 418,357 outputs
Outputs of similar age from Micro and Nano Systems Letters
#1
of 1 outputs
Altmetric has tracked 23,310,485 research outputs across all sources so far. This one is in the 42nd percentile – i.e., 42% of other outputs scored the same or lower than it.
So far Altmetric has tracked 38 research outputs from this source. They receive a mean Attention Score of 2.1. This one scored the same or higher as 26 of them.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 418,357 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 53% of its contemporaries.
We're also able to compare this research output to 1 others from the same source and published within six weeks on either side of this one. This one has scored higher than all of them