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This paper proposes a method based on the variability theory in factory physics using internal benchmark to address the problems of performance evaluation and improvement in semiconductor manufacturing factory.https://t.co/FmDkhuvxEm
This paper proposes a method based on the variability theory in factory physics using internal benchmark to address the problems of performance evaluation and improvement in semiconductor manufacturing factory.https://t.co/FmDkhuvxEm
A developed internal benchmark method is proposed, which established three-parameter method based on the Little′s law to meet performance evaluation and improvement. https://t.co/DAnU8vouva
◇IJAC Today-15 June◇ https://t.co/F59qMaqlet This paper proposes a method based on the variability theory in factory physics using internal benchmark to address the problems of performance evaluation and improvement in semiconductor manufacturing factory.