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Shape deviations in masks for optical structures produced by electron beam lithography

Overview of attention for article published in Microsystem Technologies, October 2004
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About this Attention Score

  • Among the highest-scoring outputs from this source (#31 of 260)
  • Good Attention Score compared to outputs of the same age (66th percentile)

Mentioned by

patent
1 patent

Citations

dimensions_citation
5 Dimensions

Readers on

mendeley
1 Mendeley
Title
Shape deviations in masks for optical structures produced by electron beam lithography
Published in
Microsystem Technologies, October 2004
DOI 10.1007/s00542-004-0386-3
Authors

A. Last, H. Hein, J. Mohr

Mendeley readers

The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Russia 1 100%

Demographic breakdown

Readers by professional status Count As %
Student > Postgraduate 1 100%
Readers by discipline Count As %
Engineering 1 100%

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 14 August 2012.
All research outputs
#2,914,895
of 10,883,027 outputs
Outputs from Microsystem Technologies
#31
of 260 outputs
Outputs of similar age
#33,626
of 103,715 outputs
Outputs of similar age from Microsystem Technologies
#1
of 1 outputs
Altmetric has tracked 10,883,027 research outputs across all sources so far. This one has received more attention than most of these and is in the 51st percentile.
So far Altmetric has tracked 260 research outputs from this source. They receive a mean Attention Score of 3.2. This one is in the 13th percentile – i.e., 13% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 103,715 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 66% of its contemporaries.
We're also able to compare this research output to 1 others from the same source and published within six weeks on either side of this one. This one has scored higher than all of them