Redistribution of implanted dopants in GaN

Overview of attention for article published in Journal of Electronic Materials, March 1999

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Defects annealing and impurities activation in semiconductors at thermodynamically non-stab…

Grant US-9543168-B2

United States of America

Defects annealing and impurities activation in III-nitride compound

Grant US-8518808-B2

United States of America