A micromachined, shadow-mask technology for the OMVPE fabrication of integrated optical structures

Overview of attention for article published in Journal of Electronic Materials, January 2000

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So far, Altmetric has seen 7 patents that reference this research output.

Piezoelectric transducers using micro-dome arrays

Application US-10478857-B2

United States of America

Piezoelectric transducers using micro-dome arrays

Grant US-10022750-B2

United States of America

Piezoelectric transducers using micro-dome arrays

Grant US-9919342-B2

United States of America

Piezoelectric transducers using micro-dome arrays

Grant US-9070861-B2

United States of America

Piezoelectric transducers using micro-dome arrays

Grant US-9070862-B2

United States of America

Forming curved features using a shadow mask

Grant US-8628677-B2

United States of America

Maskless, microlens EUV lithography system with grazing-incidence illumination optics

Grant US-7116405-B2

United States of America