Method for low temperature annealing of metallization micro-structures in the production… Grant US-7462269-B2 United States of America 09 Dec 2008
Method for filling recessed micro-structures with metallization in the production of a… Grant US-7244677-B2 United States of America 17 Jul 2007
Method of submicron metallization using electrochemical deposition of recesses including… Grant US-7144805-B2 United States of America 05 Dec 2006
Method and apparatus for low-temperature annealing of metallization microstructures in… Grant US-7001471-B2 United States of America 21 Feb 2006
Submicron metallization using electrochemical deposition Grant US-6806186-B2 United States of America 19 Oct 2004
Method for filling recessed micro-structures with metallization in the production of a… Grant US-6753251-B2 United States of America 22 Jun 2004