Tantalum sputtering target and method of manufacture Grant US-6958257-B2 United States of America 25 Oct 2005
Tantalum sputtering target and method of manufacture Grant US-6955938-B2 United States of America 18 Oct 2005
Tantalum sputtering target and method of manufacture Grant US-6566161-B1 United States of America 20 May 2003