Highly efficient compact capacitance coupled plasma reactor/generator and method Grant US-7241428-B2 United States of America 10 Jul 2007
Highly efficient compact capacitance coupled plasma reactor/generator and method Grant US-6998027-B2 United States of America 14 Feb 2006
Highly efficient compact capacitance coupled plasma reactor/generator and method Grant US-6576202-B1 United States of America 10 Jun 2003