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High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension

Overview of attention for article published in Microsystem Technologies, September 2012
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About this Attention Score

  • In the top 25% of all research outputs scored by Altmetric
  • Among the highest-scoring outputs from this source (#43 of 596)
  • Good Attention Score compared to outputs of the same age (75th percentile)
  • Good Attention Score compared to outputs of the same age and source (75th percentile)

Mentioned by

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2 patents

Citations

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3 Dimensions

Readers on

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15 Mendeley