Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same Grant US-11885007-B2 United States of America 30 Jan 2024
Method for manufacturing piezoelectric bulk layers with tilted c-axis orientation Grant US-11824511-B2 United States of America 21 Nov 2023
Acoustic resonator device with controlled placement of functionalization material Grant US-11695384-B2 United States of America 04 Jul 2023
Acoustic resonator device with controlled placement of functionalization material Grant US-11444595-B2 United States of America 13 Sep 2022
Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same Grant US-11401601-B2 United States of America 02 Aug 2022
Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same Grant US-11381212-B2 United States of America 05 Jul 2022
Temperature compensation and operational configuration for bulk acoustic wave resonator… Grant US-10866216-B2 United States of America 15 Dec 2020
Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed… Grant US-10574204-B2 United States of America 25 Feb 2020
Temperature compensation and operational configuration for bulk acoustic wave resonator… Grant US-10571437-B2 United States of America 25 Feb 2020
Methods for fabricating acoustic structure with inclined c-axis piezoelectric bulk and… Grant US-10541662-B2 United States of America 21 Jan 2020
Multi-stage deposition system for growth of inclined c-axis piezoelectric material… Application US-10541663-B2 United States of America 21 Jan 2020
Acoustic resonator devices and methods providing patterned functionalization areas Application US-10352904-B2 United States of America 16 Jul 2019
Acoustic resonator devices and fabrication methods providing hermeticity and surface… Application US-10302595-B2 United States of America 28 May 2019
Acoustic resonator devices and methods with noble metal layer for functionalization Grant US-10267770-B2 United States of America 23 Apr 2019
Methods for producing piezoelectric bulk and crystalline seed layers of different C-axis… Application US-10063210-B2 United States of America 28 Aug 2018
SERS substrate, method for its preparation and method for detecting an analyte using SERS Grant DE-102008048342-B4 Germany 24 Jan 2013
Method for producing surface enhanced Raman spectroscopy substrate for detecting analytes… Application DE-102008048342-A1 Germany 22 Apr 2010