| Title |
Structural, electrical, and optical properties of Ti-doped ZnO films fabricated by atomic layer deposition
|
|---|---|
| Published in |
Discover Nano, February 2013
|
| DOI | 10.1186/1556-276x-8-108 |
| Pubmed ID | |
| Authors |
Zhi-Yuan Ye, Hong-Liang Lu, Yang Geng, Yu-Zhu Gu, Zhang-Yi Xie, Yuan Zhang, Qing-Qing Sun, Shi-Jin Ding, David Wei Zhang |
| Abstract |
High-quality Ti-doped ZnO films were grown on Si, thermally grown SiO2, and quartz substrates by atomic layer deposition (ALD) at 200°C with various Ti doping concentrations. Titanium isopropoxide, diethyl zinc, and deionized water were sources for Ti, Zn, and O, respectively. The Ti doping was then achieved by growing ZnO and TiO2 alternately. A hampered growth mode of ZnO on TiO2 layer was confirmed by comparing the thicknesses measured by spectroscopic ellipsometry with the expected. It was also found that the locations of the (100) diffraction peaks shift towards lower diffraction angles as Ti concentration increased. For all samples, optical transmittance over 80% was obtained in the visible region. The sample with ALD cycle ratio of ZnO/TiO2 being 20 had the lowest resistivity of 8.874 × 10-4 Ω cm. In addition, carrier concentration of the prepared films underwent an evident increase and then decreased with the increase of Ti doping concentration. |
Mendeley readers
The data shown below were compiled from readership statistics for 87 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Netherlands | 1 | 1% |
| Unknown | 86 | 99% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 31 | 36% |
| Student > Master | 12 | 14% |
| Researcher | 11 | 13% |
| Student > Doctoral Student | 9 | 10% |
| Student > Bachelor | 6 | 7% |
| Other | 8 | 9% |
| Unknown | 10 | 11% |
| Readers by discipline | Count | As % |
|---|---|---|
| Materials Science | 22 | 25% |
| Physics and Astronomy | 20 | 23% |
| Engineering | 12 | 14% |
| Chemistry | 8 | 9% |
| Chemical Engineering | 4 | 5% |
| Other | 2 | 2% |
| Unknown | 19 | 22% |
Attention Score in Context
This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 27 February 2013.
All research outputs
#22,759,452
of 25,374,647 outputs
Outputs from Discover Nano
#798
of 1,146 outputs
Outputs of similar age
#181,285
of 205,194 outputs
Outputs of similar age from Discover Nano
#21
of 86 outputs
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So far Altmetric has tracked 1,146 research outputs from this source. They receive a mean Attention Score of 3.5. This one is in the 1st percentile – i.e., 1% of its peers scored the same or lower than it.
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We're also able to compare this research output to 86 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.